Performance and Reliability Improvement of Polycrystalline Silicon Thin Film Transistors by Deuterium Plasma Passivation
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概要
- 論文の詳細を見る
- 1998-09-07
著者
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YEH C.
Department of Electrical Engineering, Texas A&M University, College Station
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Chung Steve
Department Of Electronic Engineering National Chiao Tung University
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Chung Steve
Department Of Electrical Engineering National Tsing-hua University
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Chen Darren.
Department Of Electronic Engineering National Chiao Tung University
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LU C.
Department of Physics, National Cheng Kung University
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Yeh C.
Department Of Electrical Engineering Texas A&m University College Station
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Yeh C.
Department Of Electronic Engineering National Chiao Tung University
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Lu C.
Department Of Electronic Engineering National Chiao Tung University
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