Trace Impurity Analysis in Ta Films Using Glow Discharge Mass Spectrometry : Concentration Change of Impurities by Applying Negative Substrate Bias Voltage
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-12-15
著者
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ISSHIKI Minoru
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
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三村 耕司
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Mimura Kouji
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Isshiki Minoru
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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Lim Jae-won
Mineral Resources Research Division Korea Institute Of Geoscience & Mineral Resources
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Lim Jae-won
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
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