Interpretation of Dominant Impurities in Cu Films by Secondary Ion Mass Spectrometry and Glow Discharge Mass Spectrometry
スポンサーリンク
概要
- 論文の詳細を見る
- 2005-01-15
著者
-
ISSHIKI Minoru
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
-
三村 耕司
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
-
Mimura Kouji
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
-
Isshiki Minoru
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
-
Lim Jae-won
Mineral Resources Research Division Korea Institute Of Geoscience & Mineral Resources
-
Lim Jae-won
Institute Of Multidisciplinary Research For Advanced Materials Tohoku University
-
BAE Joon
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
関連論文
- 20aHT-6 陽電子プローブマイクロアナライザーによる塑性変形した鉄-銅合金の欠陥分布計測(20aHT 領域10 格子欠陥・ナノ構造(水素,ナノ粒子,金属),領域10(誘電体,格子欠陥,X線・粒子線,フォノン))
- 28pPSB-7 ZnSe双晶界面の2次元電子の光学・伝導特性(28pPSB 領域4ポスターセッション,領域4(半導体,メゾスコピック系・局在))
- 24aYT-13 ZnSe双晶界面における自然形成2次元電子の輸送特性 : GaAs/AlGaAsヘテロ構造との比較(量子ホール効果,領域4(半導体, メゾスコピック系・局在))
- Thermal and Optical Properties of Yb^-Doped Y_2O_3 Single Crystal Grown by the Micro-Pulling-Down Method
- Cu-Ni-Si銅合金の導電率と硬度に及ぼす冷間圧延と微量添加元素の影響
- 高純度Cu-Ti-Al合金における電気伝導性と強度
- Growth and Characterization of Yb^-doped (Lu, Y)AlO_3 Fiber Single Crystals Grown by the Micro-Pulling-Down Method
- 高純度鉄の精製といくつかの特性
- ナノメートルサイズの転位ループの一次元拡散
- Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering
- Effect of Ar/Ar-H_2 Plasma Arc Melting on Cu Purification
- Characteristics of Printed Thin Films Using Indium Tin Oxide (ITO) Ink
- Influence of Substrate Bias Voltage on the Impurity Concentrations in Hf Films Deposited by Ion Beam Deposition Method
- Interpretation of Dominant Impurities in Cu Films by Secondary Ion Mass Spectrometry and Glow Discharge Mass Spectrometry
- Trace Impurity Analysis in Ta Films Using Glow Discharge Mass Spectrometry : Concentration Change of Impurities by Applying Negative Substrate Bias Voltage
- Agglomeration of Copper Thin Film in Cu/Ta/Si Structure
- Effect of Substrate Bias Voltage on the Thermal Stability of Cu/Ta/Si Structures Deposited by Ion Beam Deposition
- Characteristics of ion beam deposited copper thin films as a seed layer : effect of negative substrate bias voltage
- 非質量分離型イオンビームデポジションによるTa拡散バリア膜の作製と評価
- 物理精製研究分野 (2000.1-2000.12)(研究活動報告)
- Influence of Substrate Bias Voltage on the Properties of Cu Thin Films by Sputter Type Ion Beam Deposition
- Improvement of Ta Barrier Film Properties in Cu Interconnection by Using a Non-mass Separated Ion Beam Deposition Method
- 抽出クロマトグラフィによるLaの分離特性の研究
- 半導体グレード世界最高超高純度鐵およびコバルトの開発
- Modeling of Elution Curves in Preparative Chromatography Using Anion-Exchange Resin for Cobalt Purification
- Purification of Manganese Chloride with Chelating Resin Containing Iminodiacetate Groups in Ammonium Chloride Solution
- Copper Purification by Anion-Exchange Separation in Chloride Media
- Cu-Ti-Al合金の時効特性に及ぼす冷間圧延の影響
- 高純度鉄の精製と表面酸化挙動
- Improvement in Oxidation Resistance of Cu-Al Dilute Alloys by Pre-annealing in H_2 and Ar Atmospheres
- Effect of Floating Zone Refining under Reduced Hydrogen Pressure on Copper Purification
- Oxidation Mechanism of Copper at 623-1073K
- Self-Diffusion along Dislocations in Ultra High Purity Iron
- 気-液平衡法による活量制御雰囲気中における溶融鉄の表面張力測定
- 非接触レーザー周期加熱カロリメトリー法による溶融高純度Feの熱物性計測
- Instability of Cl-Related Deep Defects in ZnSe
- Effect of Cd Reservoir on the Composition (y) of Cd_Zn_yTe Epilayers Grown by Hot Wall Epitaxy
- Growth and Evaluation of Cd_Zn_yTe Epilayers on (100) GaAs Substrates by Hot Wall Epitaxy
- Growth Kinetics of Hg_Cd_xTe Epilayers by Semiclosed Open-Tube Isothermal Vapor Phase Epitaxy
- Effect of CdTe Layer Thickness on Hg_Cd_xTe Epilayer Growth by Isothermal Vapor Phase Epitaxy Using (100) CdTe/GaAs Substrates and Void Formation at the Interface
- Prediction of Surface Temperature on Metal Beads Subjected to Argon-Hydrogen Transferred Arc Plasma Impingement
- Optically Detected Cyclotron Resonance in CdTe
- Surface Segregation of Chromium in a Copper-Chromium Alloy and its Effect on Formation of a Native Oxide Layer
- Surface Layer Formed by Selective Oxidation in High-Purity Copper-Titanium Binary Alloys
- 高純度金属の作製と評価 (特集 地域と世界に貢献する東北大学多元物質科学研究所)
- Floating Zone Refining Iron Reduced Pressure with Dynamic Hydrogen Flow
- 金属の高純度精製プロセス (特集 材料プロセスにおける分離操作と高純度精製)
- Purification of Hafnium by Hydrogen Plasma Arc Melting
- Interpretation of Dominant Impurities in Cu Films by Secondary Ion Mass Spectrometry and Glow Discharge Mass Spectrometry
- Trace Impurity Analysis in Ta Films Using Glow Discharge Mass Spectrometry: Concentration Change of Impurities by Applying Negative Substrate Bias Voltage
- Preparation of Ultra-High Purity Cylindrical Mo Ingot by Electron Beam Drip Melting
- Effect of Substrate Bias Voltage on the Thermal Stability of Cu/Ta/Si Structures Deposited by Ion Beam Deposition