Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering
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概要
- 論文の詳細を見る
- Japan Institute of Metalsの論文
- 2010-01-01
著者
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Choi Good-sun
Mineral Resources Research Division Korea Institute Of Geoscience & Mineral Resources
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LE Minh-Tung
Mineral Resources Research Division, Korea Institute of Geoscience & Mineral Resources
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SOHN Yong-Un
Mineral Resources Research Division, Korea Institute of Geoscience & Mineral Resources
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LIM Jae-Won
Mineral Resources Research Division, Korea Institute of Geoscience & Mineral Resources
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Lim Jae-won
Mineral Resources Research Division Korea Institute Of Geoscience & Mineral Resources
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Le Minh-tung
Mineral Resources Research Division Korea Institute Of Geoscience & Mineral Resources
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Sohn Yong-un
Mineral Resources Research Division Korea Institute Of Geoscience & Mineral Resources
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Lim Jae-won
Mineral Resources Res. Div. Korea Inst. Of Geoscience And Mineral Resources
関連論文
- Effect of Sputtering Power on the Nucleation and Growth of Cu Films Deposited by Magnetron Sputtering
- Effect of Ar/Ar-H_2 Plasma Arc Melting on Cu Purification
- Characteristics of Printed Thin Films Using Indium Tin Oxide (ITO) Ink
- Influence of Substrate Bias Voltage on the Impurity Concentrations in Hf Films Deposited by Ion Beam Deposition Method
- Interpretation of Dominant Impurities in Cu Films by Secondary Ion Mass Spectrometry and Glow Discharge Mass Spectrometry
- Trace Impurity Analysis in Ta Films Using Glow Discharge Mass Spectrometry : Concentration Change of Impurities by Applying Negative Substrate Bias Voltage
- Agglomeration of Copper Thin Film in Cu/Ta/Si Structure
- Influence of Substrate Bias Voltage on the Properties of Cu Thin Films by Sputter Type Ion Beam Deposition
- Improvement of Ta Barrier Film Properties in Cu Interconnection by Using a Non-mass Separated Ion Beam Deposition Method
- Preparation of Ultra-High Purity Cylindrical Mo Ingot by Electron Beam Drip Melting
- Rapid Consolidation of TiN-Cr_2N-(Ti,Cr)N Nanoparticles Using Pulsed Current Activated Sintering and the Mechanical Properties of Sintered Product