テーブルトップのマイクロマシン工場, 「ナノ・マニュファクチャリング・ワールド」の構築

概要

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To fabricate micro machines, the authors designed, constructed, and evaluated a tabletop, integrated factory called "nano manufacturing world (NMW)". In NMW, we accommodates a compact layout where fabricating/handling machines are concentrated around a workpiece, and a tele-operation system between the processing site and the operating site, which involves dynamic, realtime, high-resolving and 3D images using scanning electron microscopes. We developed various working processes in NMW: e.g. fast atom beam etching, micro assembling using a concentrated motion manipulator. Through the demonstration of fabricating some 3-dimensional micro structures, we evaluate that NMW functions effectively as intended, and will become a solution for micro manufacturing system.