カーボンナノチューブの生成過程観察のための走査型電子顕微鏡内局所CVD装置の開発

概要

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Carbon nano tube (CNT) with its unique structure and functions is expected to be an effective element for nano-meter scale devices. To develop more applicable synthetic method, the growth process of CNT should be revealed. Here is presented a local CVD system. The system can synthesize CNTs under the observation of scanning electron microscopy (SEM), and the CNT growth is hereby presented. The local CVD system consists of a heating system and a gas inducing system. The heating system can heat up to 1000 degrees, permitting the thermal limit of the SEM. The gas inducing system can create a 1.6torr local pressure area, also permitting the pressure limit of the SEM observation. Using this system, the growth of CNT is real-timely observed. According to Raman spectra, most of synthesized CNTs are supposed to be multi-walled carbon nano tubes. The growth of CNT looked to extend from the root. The rate of the growth is about 5nm per second.
社団法人精密工学会の論文
2005-02-05