熱アシスト射出成形による高アスペクト比ナノ構造の高速転写(<小特集>第1回マイクロ・ナノ工学シンポジウム)

概要

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Injection molding intrinsically has advantages of high throughput and flexibility of the replica shapes, as you can see that various industrial components and machine parts made from polymer are produced by using injection molding. However, nanostructures, especially with fine and high-aspect-ratio nanostructured surfaces, are hardly replicated by injection molding, because a solidified skin layer is formed on the polymer surface at the moment the melted polymer contacts the mold surface. In this note, we introduce the heat-assisted injection molding, in which the mold surface is dynamically heated during polymer injection. This process realizes as short cycle times as conventional injection molding and as high replication factors as other thermal nanoimprint technique, in which the polymer plate is pressed by a mold and heated over its glass transition temperature. We show the replication of 800-nm-pitch and 350-nm-depth line-and-spaces. And 90-nm-pitch line-and-space and 180-nm-pitch hole patterns were also successfully replicated within 15s using this method.
2010-08-25