送り偏差に関する知識を用いた高精度位置決め装置の試み

概要

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In order to realize an ultraprecise feeder, the authors designed a feeder with the following new function: it has knowledge of its own deviation of feeding position induced by fluctuations of environmental factors, and controls its feeding position using that knowledge. To effect the function, the feeder is composed of three mechanism elements: (1) sensors of thermal expansion, external force and machining fluctuation, (2) a computer which estimates the deviation in real time from the sensed fluctuations of environmental factors, (3) an actuator which accurately compensates for the deviation. To construct the mechanism elements, we developed some structural elements: e.g., a thermal deformation sensor of Invar alloy, a precise actuator with a nonhysteresis piezo element controlled by a displacement sensor and a coarse actuator with a non-backlash ball screw (φ4 mm) preloaded by doublenuts. As an evaluation of the synthesized structure, we compensated for the deviation under the condition of various environmental factors. It was clarified that it could feed to any point within ±0.3 μm accuracy even if the working range is 5mm, tempera ture variation is 4 degrees or external force is 6 N. Through the evaluation, we confirmed that the designed feeder accomplishes the new function.
1996-02-25