Real-Time Ellipsometric Measurement during Growth of (Al_XGa_<1-X>)_<0.52>In_<0.48>P Thin Films
スポンサーリンク
概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1996-09-01
著者
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Yoshida T
Department Of Electronic Engineering Faculty Of Engineering Takushoku University
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Yoshida T
Matsushita Electric Co. Tochigi Jpn
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YOSHIOKA Yoshifumi
Technology Research Laboratory, Shimadzu Corporation
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HASHIMOTO Toyoyuki
Technology Research Laboratory, Shimadzu Corporation
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YOSHIDA Tamio
Technology Research Laboratory, Shimadzu Corporation
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SHIGESADA Yorikazu
Technology Research Laboratory, Shimadzu Corporation
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Yoshida T
Fukuoka Univ. Fukuoka Jpn
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Yoshida Tamio
Technology Research Laboratory Shimadzu Corporation
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Yoshioka Yoshifumi
Technology Research Laboratory Shimadzu Corporation
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Hashimoto Toyoyuki
Technology Research Laboratory Shimadzu Corporation
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