A Promising Evaluation Method of Ultra-Low-Expansion Glasses for the Extreme Ultra-Violet Lithography System by the Line-Focus-Beam Ultrasonic Material Characterization System

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概要

• 論文の詳細を見る
• Japan Society of Applied Physicsの論文
• 2004-11-01

著者

• OHASHI Yuji

  Department of Chemistry and Materials Science Tokyo Institute of Technology

• KUSHIBIKI Jun-ichi

  Department of Electrical Engineering, Tohoku University

• ARAKAWA Mototaka

  Department of Electrical Engineering, Tohoku University

• SUZUKI Kouji

  Department of Radiology Tsurumi Hospital

• Maruyama Takahisa

  Dept. Of Elect. Eng. Tohoku Univ.

• Suzuki Kouji

  Tohoku Univ. Sendai Jpn

• MARUYAMA Takahisa

  Department of Electrical Engineering, Tohoku University

• Kushibiki Jun-ichi

  Deparment Of Electrical Engineering Faculty Of Engineering Tohoku University

• Arakawa Mototaka

  Department Of Electrical Engineering Tohoku University

• Kushibiki J

  Department Of Electrical Engineering Tohoku University

• Suzuki Kouji

  Department Of Electronics And Computer Science Faculty Of Engineering Toyama University

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