F-2 A Super-Precision Evaluation Method of CTE for Ultra-Low Expansion Glasses Using the LFB Ultrasonic Material Characterization System(Measurement techniques, Imaging, Nondestructive testing)
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概要
- 論文の詳細を見る
We applied the LFB-UMC system to the evaluation of commercial TiO_2-SiO_2 glasses, and demonstrated that this system is extremely useful for characterization of ULE glasses in the EUVL system. We will hereafter improve the measurement accuracy and study the measurement model to establish the striae evaluation method for the TiO_2-SiO_2 glasses.
- 超音波エレクトロニクスの基礎と応用に関するシンポジウム運営委員会の論文
- 2004-10-27
著者
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KUSHIBIKI Jun-ichi
Department of Electrical Engineering, Tohoku University
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ARAKAWA Mototaka
Department of Electrical Engineering, Tohoku University
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Maruyama Takahisa
Dept. Of Elect. Eng. Tohoku Univ.
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Suzuki Kouji
Tohoku Univ. Sendai Jpn
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Kushibiki Jun-ichi
Dept. of Elect. Eng., Tohoku Univ.
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Arakawa Mototaka
Dept. of Elect. Eng., Tohoku Univ.
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Ohashi Yuji
Dept. of Elect. Eng., Tohoku Univ.
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Suzuki Kouji
Dept. of Elect. Eng., Tohoku Univ.
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Kushibiki J
Department Of Electrical Engineering Tohoku University
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Suzuki Kouji
Dept. Of Elect. Eng. Tohoku Univ.
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Ohashi Yuji
Department of Electrical Engineering, Tohoku University
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- F-2 A Super-Precision Evaluation Method of CTE for Ultra-Low Expansion Glasses Using the LFB Ultrasonic Material Characterization System(Measurement techniques, Imaging, Nondestructive testing)
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