Correction of Velocity Profiles on Thin Specimens Measured by Line-Focus-Beam Acoustic Microscopy
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概要
- 論文の詳細を見る
A new method of correcting apparent velocities of leaky surface acoustic waves (LSAWs), measured by line-focus-beam acoustic microscopy, for thin specimens having elastic inhomogeneities is proposed to eliminate serious errors due to back reflection. This method estimates and removes the apparent measurement errors using the frequency dependence of LSAW velocities measured at a reference position on the specimen with a certain thickness, and also using the relationship between two LSAW velocity values measured at two frequencies and apparent velocity changes included in those values. This correction method is more efficient for a number of measurement positions than the previously developed method of moving-average processing. Measurements of LSAW velocities along the crystal pulling-axis (Z-axis) direction of a Y-cut, X-axis propagating 5-mol% MgO-doped LiNbO_3 substrate, with a thickness of about 0.5 mm, are demonstrated.
- 社団法人応用物理学会の論文
- 1999-10-15
著者
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OHASHI Yuji
Department of Chemistry and Materials Science Tokyo Institute of Technology
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Ohashi Yuji
Dept. of Elect. Eng., Tohoku Univ.
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Kushibiki Jun-ichi
Department Of Electrical Engineering Tohoku University
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Kushibiki Jun-ichi
Deparment Of Electrical Engineering Faculty Of Engineering Tohoku University
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Ohashi Yuji
Department of Electrical Engineering, Tohoku University
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