Theoretical and Experimental Considerations on Line-Focus-Beam Acoustic Microscopy for Thin Specimens
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概要
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The measurement principle for line-focus-beam acoustic microscopy is extended to apply to thin specimens taking into consideration back-reflection effects. The theoretical expressions and interpretation are given for the apparent and periodic changes in leaky surface acoustic wave (LSAW) velocity and attenuation with a constant frequency interval ΔF_1 in the frequency dependence at a chosen measurement position. The validity of taking moving average with a moving period±ΔF_1/2 to obtain true measurement values is proven, and followed by experiments for a Y-cut, X-propagating MgO:LiNbO_3 wafer specimen with 505.6-μm thickness.
- 社団法人応用物理学会の論文
- 1999-03-15
著者
-
OHASHI Yuji
Department of Chemistry and Materials Science Tokyo Institute of Technology
-
Kushibiki Jun-ichi
Deparment Of Electrical Engineering Faculty Of Engineering Tohoku University
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Ohashi Yuji
Department Of Electrical Engineering Tohoku University
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