Precise Velocity Measurements for Thin Specimens by Line-Focus-Beam Acoustic Microscopy

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概要

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• When line-focus-beam acoustic microscopy is applied to thin specimens, waves reflected from the back surface of the specimen cause a serious problem in measurement accuracy of measured leaky surface acoustic wave (LSAW) velocities. Experimental results show that the velocities vary not only with the employed ultrasonic frequency but also with the specimen thickness. A method of eliminating that influence using the moving average of the frequency dependence of LSAW velocities is proposed and demonstrated for a Z-cut 5-mol% MgO-doped LiNbO_3 wafer specimen about 380-μm thick.

• 社団法人応用物理学会の論文
• 1999-01-15

著者

• OHASHI Yuji

  Department of Chemistry and Materials Science Tokyo Institute of Technology

• KUSHIBIKI Jun-ichi

  Department of Electrical Engineering, Tohoku University

• ARAKAWA Mototaka

  Department of Electrical Engineering, Tohoku University

• Ohashi Yuji

  Dept. of Elect. Eng., Tohoku Univ.

• Kushibiki Jun-ichi

  Deparment Of Electrical Engineering Faculty Of Engineering Tohoku University

• Arakawa Mototaka

  Department Of Electrical Engineering Tohoku University

• Kushibiki J

  Department Of Electrical Engineering Tohoku University

• Ohashi Yuji

  Department of Electrical Engineering, Tohoku University

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