A Promising Method of Evaluating ZnO Single Crystals Using the Line-Focus-Beam Ultrasonic Material-Characterization System
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概要
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Preliminary experiments and numerical calculations were conducted for developing a new ultrasonic method of evaluating resistivity distributions in ZnO single crystals using the line-focus-beam ultrasonic material-characterization system. Velocity and attenuation of leaky surface acoustic waves (LSAWs) were measured at 225 MHz on three $Z$-cut ZnO specimens with different resistivities. We observed drastic LSAW velocity and attenuation changes associated with relaxation between piezoelectricity and semiconduction for LSAW propagation: 56 m/s in velocity and 0.012 in normalized attenuation around a resistivity of 8.3 $\Omega$ m. This ultrasonic method is promising for ZnO crystal characterization.
- Japan Society of Applied Physicsの論文
- 2009-02-25
著者
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OHASHI Yuji
Department of Chemistry and Materials Science Tokyo Institute of Technology
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ARAKAWA Mototaka
Department of Electrical Engineering, Tohoku University
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Tanaka Tomoya
Department Of Electrical Engineering Tohoku University
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Tanaka Tomoya
Department Of Biological Functions And Engineering Kyushu Institute Of Technology
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Kushibiki Jun-ichi
Deparment Of Electrical Engineering Faculty Of Engineering Tohoku University
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Arakawa Mototaka
Department Of Electrical Engineering Tohoku University
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Kushibiki J
Department Of Electrical Engineering Tohoku University
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TANAKA Tomoya
Department of Biochemical Engineering, Graduate School of Science and Engineering, Yamagata University
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