AlGaN Ultraviolet A and Ultraviolet C Photodetectors with Very High Specific Detectivity D^{*}

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概要

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• The development of AlGaN pin photodetectors sensitive in the UV range with different narrow band active regions is reported in this paper. Structures were grown by metalorganic vapor phase epitaxy on (0001) sapphire substrates using three-dimensional GaN as well as high temperature AlN nucleation. Very high specific detectivities of 1\times 10^{14} cm Hz^0.5W^-1can be achieved based on optimized growth conditions of undoped and doped AlGaN layers with an Al-content ranging from 0% up to 100%. The crack-free AlGaN layers have edge dislocation densities in the range of 5\times 10^{9} cm^-2. Based on the two different nucleation types, pin layer structures were grown and fabricated to UV-A (320 to 365 nm) and UV-C (< 280 nm) photodetectors. The electro-optical performance of these photodetectors measured on-wafer will be presented in this paper, supplemented by the data of a single photodetector chip mounted in a TO 18 package.

• 2013-08-25

著者

• Driad Rachid

  Fraunhofer Institute Of Applied Solid State Physics

• Kohler Klaus

  Fraunhofe-institut Fur Angewandte Festkorperphysik

• Ambacher Oliver

  Fraunhofer Institute Applied Solid-state Physics

• KIRSTE Lutz

  Fraunhofer-Institut fur Angewandte Festkorperphysik

• Walther Martin

  Fraunhofer-Institut für Angewandte Festkörperphysik, Tullastrasse 72, 79108 Freiburg, Germany

• John Oliver

  Fraunhofer-Institut für Angewandte Festkörperphysik, Tullastrasse 72, 79108 Freiburg, Germany

• Driad Rachid

  Fraunhofer-Institut für Angewandte Festkörperphysik, Tullastrasse 72, 79108 Freiburg, Germany

• Albrecht Björn

  Fraunhofer-Institut für Angewandte Festkörperphysik, Tullastrasse 72, 79108 Freiburg, Germany

• Kopta Susanne

  Fraunhofer-Institut für Angewandte Festkörperphysik, Tullastrasse 72, 79108 Freiburg, Germany

• Kopta Susanne

  Fraunhofer-Institut für Angewandte Festkörperphysik, Tullastrasse 72, 79108 Freiburg, Germany

• Ambacher Oliver

  Fraunhofer-Institut für Angewandte Festkörperphysik, Tullastrasse 72, 79108 Freiburg, Germany

• Kirste Lutz

  Fraunhofer-Institut für Angewandte Festkörperphysik, Tullastrasse 72, 79108 Freiburg, Germany

• Kirste Lutz

  Fraunhofer-Institut für Angewandte Festkörperphysik, 79108 Freiburg, Germany

• Albrecht Björn

  Fraunhofer-Institut für Angewandte Festkörperphysik, Tullastrasse 72, 79108 Freiburg, Germany

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