Fabrication of High Breakdown Pseudomorphic Modulation Doped Field Effect Transistors Using Double Dry Etched Gate Recess Technology in Combination with E-Beam T-Gate Lithography
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-12-30
著者
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KOHLER Klaus
Fraunhofer-Institut fur Angewandte Festkorperphysik
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Hulsmann Axel
Fraunhofer Institut Fur Angewandte Festkorperphysik
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Kohler Klaus
Fraunhofe-institut Fur Angewandte Festkorperphysik
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Kohler Klaus
Fraunhofer Institut Fur Angewandte Festkorperphysik
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Braunstein Jurgen
Fraunhofer Institut Fur Angewandte Festkorperphysik
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BRONNER Wolfgang
Fraunhofer Institut fur Angewandte Festkorperphysik
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TASKER Paul
Fraunhofer Institut fur Angewandte Festkorperphysik
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- Fabrication of High Breakdown Pseudomorphic Modulation Doped Field Effect Transistors Using Double Dry Etched Gate Recess Technology in Combination with E-Beam T-Gate Lithography
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