Behavior of Surface Acoustic Wave Resonators in Supercritical CO<sub>2</sub>
スポンサーリンク
概要
- 論文の詳細を見る
By utilizing a surface acoustic wave (SAW), it may be possible to realize a sensor for measuring the density fluctuation of supercritical fluids. In this study, the behaviors of a Rayleigh-SAW resonator fabricated on 128° Y--X LiNbO<sub>3</sub> and a pure shear-horizontal-type SAW resonator fabricated on ST 90°-X quartz were measured in high-pressure CO<sub>2</sub>. Abrupt changes in resonance properties were observed at a certain pressure. The rate of change of antiresonance frequency at a pressure between 5 and 6 MPa in the case of LiNbO<sub>3</sub> reached 1,320 ppm at approximately 199 MHz. For both the cases of LiNbO<sub>3</sub> and quartz, it was found that the impedance, particularly antiresonance impedance, was effective for sensing the difference between gas and liquid phases without affecting the temperature. The causes of the changes in the frequency and impedance were discussed.
- 2011-07-25
著者
-
Kakio Shoji
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
-
Nakagawa Yasuhiko
University of Yamanashi
-
KONDOH Eiichi
Interdisciplinary Graduate School of Medicine and Engineering Department of Mechanical System Engine
-
Hayashi Katsuhiro
Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan
-
Nakagawa Yasuhiko
University of Yamanashi, Professor Emeritus, Kofu 400-8510, Japan
関連論文
- P2-41 Reflection Properties of SH-Type SAW in Periodic Gold Grating on Langasite(Poster session 2)
- Deposition of Ru Thin Films from Supercritical Carbon Dioxide Fluids
- Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide
- Propagation Characteristics of Shear-Horizontal-Type Surface Acoustic Wave on Langasite with Au or Ta_2O_5 Thin Film
- High Coupling and Highly Stable Shear-Horizontal-Type Surface Acoustic Wave on Langasite with Au or Ta_2O_5 Thin Film
- Characteristics of Reflection of Resonators Using Lamb Wave on AT-Cut Quartz
- Improvement of Diffraction Properties in Waveguide-Type Acoustooptic Modulator Driven by Surface Acoustic Wave
- P2-25 Beam-Propagation Analysis of RGB Acoustooptic Modulator Driven by Surface Acoustic Waves(Poster session 2)
- P2-24 Monolithically Integrated Tandem Waveguide-type Acoustoptic Modulator Driven by Surface Acoustic Waves(Poster session 2)
- Diffraction Properties and Beam-Propagation Analysis of Waveguide-Type Acoustooptic Modulator Driven by Surface Acoustic Wave
- Propagation and Resonance Properties of Love-Type Surface Acoustic Wave on $Y$–$X$ LiTaO3 with TeO2 Thin Film
- Optical Properties of a Piezoelectric Ta2O5 Single Crystal Film
- Behavior of Surface Acoustic Wave Resonators in Supercritical CO2
- Surface-Acoustic-Wave-Driven Acoustooptic Modulator with Wide Wavelength Range for Visible Laser Light
- Simple Simultaneous Modulation for Red, Green, and Blue Laser Lights Using Surface-Acoustic-Wave-Driven Acoustooptic Modulator
- Fabrication and Evaluation of Highly Oriented Ta2O5 Piezoelectric Thin Films Prepared by Radio Frequency Magnetron Sputtering
- Leaky-Surface-Acoustic-Wave Properties on Reverse-Proton-Exchanged LiNbO3
- Deposition of Zinc Oxide Thin Films in Supercritical Carbon Dioxide Solutions
- Fabrication and Evaluation of Highly (110)-Oriented Potassium Niobate Thin Films Prepared by RF-Magnetron Sputtering
- Monolithically Integrated Tandem Waveguide-Type Acoustooptic Modulator Driven by Surface Acoustic Waves
- Improvement of Diffraction Properties in Waveguide-Type Acoustooptic Modulator Driven by Surface Acoustic Wave
- Diffraction Properties and Beam-Propagation Analysis of Waveguide-Type Acoustooptic Modulator Driven by Surface Acoustic Wave
- Reflection Properties of Shear-Horizontal Surface Acoustic Wave in Periodic Gold Grating on Langasite
- Frequency-Shifted Feedback Fiber Laser Oscillation with Monolithically Integrated Tandem Waveguide-Type Acoustooptic Modulator Driven by Surface Acoustic Waves
- Modification of Surface-Acoustic-Wave-Driven Tandem Acoustooptic Frequency Shifter for Improvement of Diffraction Properties
- Optical Mode Converter Using Lamb Wave
- Resonance Properties of Surface Acoustic Wave Resonator in Supercritical CO2
- Polarization Control by Leaky Surface Acoustic Wave in Reverse-Proton-Exchanged LiNbO3 Optical Waveguide
- Surface Acoustic Wave Properties of Amorphous Ta2O5 and Nb2O5 Thin Films Prepared by Radio Frequency Sputtering
- Conformal Copper Coating of True Three-Dimensional Through-Holes Using Supercritical Carbon Dioxide
- Resonators Using a Lamb Wave on AT-Cut Quartz
- Propagation Characteristics of Substrate for Lamb-Wave-Type Elastic Wave Devices
- Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization
- Characteristics of Reflection of Resonators Using Lamb Wave on AT-Cut Quartz
- Longitudinal-Type Leaky Surface Acoustic Wave on LiNbO
- Propagation Characteristics of Shear-Horizontal-Type Surface Acoustic Wave on Langasite with Au or Ta2O5 Thin Film
- High Coupling and Highly Stable Shear-Horizontal-Type Surface Acoustic Wave on Langasite with Au or Ta2O5 Thin Film
- Evaluation of Piezoelectric Ta₂O₅ Thin Films Deposited on Sapphire Substrates (Special Issue : Ultrasonic Electronics) -- (Piezoelectric devices (bulk wave devices, surface wave devices))
- Temperature Characteristics of Substrates for Lamb-Wave-Type Acoustic Wave Devices
- Hydrogen Gas Sensor Using Good Characteristics of Lamb Wave
- Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization
- Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide