High Coupling and Highly Stable Shear-Horizontal-Type Surface Acoustic Wave on Langasite with Au or Ta2O5 Thin Film

概要

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In this study, the propagation characteristics of a pure shear-horizontal-type surface acoustic wave on rotated Y-cut 90° X propagation langasite (at Euler angles of (0°, $\theta$, 90°)) with a high-density thin film, such as a gold (Au) film or a tantalum pentoxide (Ta2O5) dielectric film, are investigated. The theoretical analysis showed that, by loading with these films, coupling factor increases to about 1.0% for a certain condition. In fact, the measured coupling factors for $\theta=20$° were 0.80% and 0.61%, for the samples with a Au film thickness of 0.015 wavelength ($\lambda$) and a Ta2O5 film thickness of 0.047 $\lambda$, respectively. For both films, the measured frequency shifts in the temperature change for $\theta=20$° showed that a temperature characteristic with a zero temperature coefficient of delay in the same as the ST-90°X quartz with a free surface can be obtained by appropriately choosing the film thickness.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2004-05-15