Evaluation of Piezoelectric Ta₂O₅ Thin Films Deposited on Sapphire Substrates (Special Issue : Ultrasonic Electronics) -- (Piezoelectric devices (bulk wave devices, surface wave devices))
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概要
著者
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Kakio Shoji
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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Iwamoto Shunsuke
Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan
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Saigusa Ryosuke
Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan
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- Longitudinal-Type Leaky Surface Acoustic Wave on LiNbO
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- Evaluation of Piezoelectric Ta₂O₅ Thin Films Deposited on Sapphire Substrates (Special Issue : Ultrasonic Electronics) -- (Piezoelectric devices (bulk wave devices, surface wave devices))
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