# Propagation Characteristics of Shear-Horizontal-Type Surface Acoustic Wave on Langasite with Au or Ta2O5 Thin Film

## 概要

The propagation characteristics, mainly the propagation loss and bulk wave radiation loss, of a pure shear-horizontal-type surface acoustic wave on (0°, $\theta$, 90°)-cut langasite with a high-density thin film such as a gold (Au) film or a tantalum pentoxide (Ta2O5) dielectric film were investigated experimentally. The cut angles $\theta$ of 0°, 10° and 20° were chosen because a coupling factor of 1.0% and a zero temperature coefficient of delay (TCD) can both be expected at approximately these cut angles. For the Au film, the propagation loss and bulk wave radiation loss were small at $\theta=10$°.

## 著者

Kakio Shoji Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
Nakagawa Yasuhiko Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
Nozawa Masaya Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
Nozawa Masaya Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Takeda 4-3-11, Kofu 400-8511, Japan