Propagation Characteristics of Shear-Horizontal-Type Surface Acoustic Wave on Langasite with Au or Ta2O5 Thin Film
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概要
- 論文の詳細を見る
The propagation characteristics, mainly the propagation loss and bulk wave radiation loss, of a pure shear-horizontal-type surface acoustic wave on (0°, $\theta$, 90°)-cut langasite with a high-density thin film such as a gold (Au) film or a tantalum pentoxide (Ta2O5) dielectric film were investigated experimentally. The cut angles $\theta$ of 0°, 10° and 20° were chosen because a coupling factor of 1.0% and a zero temperature coefficient of delay (TCD) can both be expected at approximately these cut angles. For the Au film, the propagation loss and bulk wave radiation loss were small at $\theta=10$°.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-06-15
著者
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Kakio Shoji
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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Nakagawa Yasuhiko
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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Nozawa Masaya
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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Nozawa Masaya
Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Takeda 4-3-11, Kofu 400-8511, Japan
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