Surface Acoustic Wave Properties of Amorphous Ta2O5 and Nb2O5 Thin Films Prepared by Radio Frequency Sputtering
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概要
- 論文の詳細を見る
The fundamental acoustic properties of amorphous Ta2O5 and Nb2O5 thin films prepared by RF sputtering were evaluated using a Rayleigh-type surface acoustic wave (SAW) on 128° YX-LiNbO3 and a shear-horizontal-type SAW on 36° YX-LiTaO3. The elastic constants c_{11} and c_{44} of the thin films were determined from the measured phase velocities of two SAW modes with mutually perpendicular particle motion. Although the elastic constants of the Ta2O5 thin film were found to be approximately 14--17% larger than those of the Nb2O5 thin film, it was clarified that the Ta2O5 thin film has a stronger SAW trapping effect than the Nb2O5 thin film because the density of the former was measured to be 1.5 times higher than that of the latter. On the other hand, the Nb2O5 thin film has a smaller propagation loss for a Rayleigh-type SAW, a lower temperature coefficient of delay, and a higher refractive index than the Ta2O5 thin film.
- 2012-07-25
著者
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Kakio Shoji
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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OHASHI Yuji
Graduate School of Science and Engineering, Tokyo Institute of Technology
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Arakawa Mototaka
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Kushibiki Jun-ichi
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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Hosaka Keiko
Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan
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ARAKAWA Mototaka
Graduate School of Engineering, Tohoku University
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OHASHI Yuji
Graduate School of Engineering, Tohoku University
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KUSHIBIKI Jun-ichi
Graduate School of Engineering, Tohoku University
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Ohashi Yuji
Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
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