Reflection Properties of Shear-Horizontal Surface Acoustic Wave in Periodic Gold Grating on Langasite
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概要
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The reflection properties of a pure shear-horizontal (SH) surface acoustic wave (SAW) in a periodic gold (Au) grating on rotated $Y$-cut 90° $X$ propagation langasite (LGS) with Euler angles of $(0{\degree},\theta,90{\degree})$ are investigated experimentally. The reflection coefficient was directly measured using an electrode consisting of two probe interdigital transducers and a shorted grating with 60 metal strips. When the Au film thickness was $0.015\lambda$ and the metallization ratio $\eta$ was 0.43, the reflection coefficient was measured to be 0.73, which was larger than similarly measured values for Rayleigh waves on Al/ST-X quartz of 0.62 and Al/LGS$(0{\degree},140{\degree},25{\degree})$ of 0.41. By taking the measured propagation loss for SH SAW on Au/LGS$(0{\degree},0{\degree},90{\degree})$ into consideration, a reflection coefficient close to 1.0 was obtained. Furthermore, the equivalent-circuit parameters for SH SAW on Au/LGS$(0{\degree},0{\degree},90{\degree})$ were determined from the measured resonance characteristics of a normal IDT with 60 finger pairs; then the reflection coefficient was calculated using those parameters. The reflection coefficient predicted was 0.98 for the shorted grating with 60 metal strips on Au/LGS$(0{\degree},0{\degree},90{\degree})$, and agreed with the result obtained by direct measurement. The number of strips on Au/LGS$(0{\degree},0{\degree},90{\degree})$ required to obtain a reflection coefficient of 0.9 was predicted to be 20, which was one-fourth that in the case of Al/ST-X quartz.
- 2007-07-30
著者
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Kakio Shoji
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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Nakagawa Yasuhiko
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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Tanabe Satoshi
Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan
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