Conformal Copper Coating of True Three-Dimensional Through-Holes Using Supercritical Carbon Dioxide

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概要

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• Copper thin films were deposited inside true three-dimensional, high aspect ratio, and complex shaped through-holes that were formed in glass substrates. The deposition was carried out in a supercritical carbon dioxide solution from a copper complex via hydrogen reduction. The conformal thin films were successfully deposited on the sidewalls of straight, crank-shaped, and Y-shaped through-holes. The coating length increased with decreasing the deposition temperature. Numerical simulations suggested an importance of the presence of a fluid motion in the through-holes.

• 2012-05-25

著者

• KONDOH Eiichi

  Interdisciplinary Graduate School of Medicine and Engineering Department of Mechanical System Engine

• Watanabe Mitsuhiro

  Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan

• Takeuchi Yuto

  Interdisciplinary of Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan

• Ueno Takahiro

  Interdisciplinary of Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan

• Matsubara Masahiro

  Interdisciplinary of Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan

• Yamamoto Satoshi

  Electron Device Laboratory, Fujikura Ltd., Sakura, Chiba 285-8550, Japan

• Kikukawa Naohiro

  Electron Device Laboratory, Fujikura Ltd., Sakura, Chiba 285-8550, Japan

• Suemasu Tatsuo

  Electron Device Laboratory, Fujikura Ltd., Sakura, Chiba 285-8550, Japan

関連論文

• Deposition of Ru Thin Films from Supercritical Carbon Dioxide Fluids
• Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide
• Behavior of Surface Acoustic Wave Resonators in Supercritical CO2
• Deposition of Zinc Oxide Thin Films in Supercritical Carbon Dioxide Solutions
• Resonance Properties of Surface Acoustic Wave Resonator in Supercritical CO2
• Conformal Copper Coating of True Three-Dimensional Through-Holes Using Supercritical Carbon Dioxide
• Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization
• Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization
• Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide

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