Deposition of Zinc Oxide Thin Films in Supercritical Carbon Dioxide Solutions
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概要
- 論文の詳細を見る
This article reports the deposition of ZnO thin films in supercritical CO2 solutions likely for the first time. Zincacetylacetonate was dissolved in supercritical CO2, together with oxygen, and was processed at 8--13 MPa and 230--380 °C. Continuous crystalline films were obtained on Si and sapphire at temperatures higher than 280 °C. The-band-edge emission at 370 nm was confirmed in photoluminescence spectra.
- Japan Society of Applied Physicsの論文
- 2008-06-25
著者
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SASAKI Kenji
Faculty of Pharmaceutical Sciences, Okayama University
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KONDOH Eiichi
Interdisciplinary Graduate School of Medicine and Engineering Department of Mechanical System Engine
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Kondoh Eiichi
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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Nabetani Yoichi
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
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Sasaki Kenji
Faculty Of Engineering University Of Yamanashi
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