Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization

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概要

• 論文の詳細を見る

• This study demonstrated that a thin ZnO layer functions as a strong adhesion layer between Cu and glass, even when Cu films are formed near room temperature. The adhesion strength was studied with a scratch tester and the films and interfaces were characterized by scanning transmission electron microscopy. The origin of the high adhesion strength was discussed in terms of the presence of an extremely thin (approximately 10 nm) intermixing layer consisting of Cu, Pd, Zn, O, and Si.

• The Japan Society of Applied Physicsの論文
• 2013-05-25

著者

• KONDOH Eiichi

  Interdisciplinary Graduate School of Medicine and Engineering Department of Mechanical System Engine

• Teraoka Akira

  Internal Medicine Teraoka Memorial Hospital

• Nabetani Yoichi

  Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi

• Watanabe Mitsuhiro

  Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan

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• Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization
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