Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization
スポンサーリンク
概要
- 論文の詳細を見る
This study demonstrated that a thin ZnO layer functions as a strong adhesion layer between Cu and glass, even when Cu films are formed near room temperature. The adhesion strength was studied with a scratch tester and the films and interfaces were characterized by scanning transmission electron microscopy. The origin of the high adhesion strength was discussed in terms of the presence of an extremely thin (approximately 10 nm) intermixing layer consisting of Cu, Pd, Zn, O, and Si.
- 2013-05-25
著者
-
KONDOH Eiichi
Interdisciplinary Graduate School of Medicine and Engineering Department of Mechanical System Engine
-
Teraoka Akira
Internal Medicine Teraoka Memorial Hospital
-
Nabetani Yoichi
Interdisciplinary Graduate School Of Medicine And Engineering University Of Yamanashi
-
Watanabe Mitsuhiro
Interdisciplinary Graduate School of Medicine and Engineering, University of Yamanashi, Kofu 400-8511, Japan
関連論文
- Deposition of Ru Thin Films from Supercritical Carbon Dioxide Fluids
- Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide
- Structural and Luminescence Properties of InAs Quantum Dots : Effect of Nitrogen Exposure on Dot Surfaces
- Behavior of Surface Acoustic Wave Resonators in Supercritical CO2
- Deposition of Zinc Oxide Thin Films in Supercritical Carbon Dioxide Solutions
- ENDOSCOPY IS ONE OF THE VALUABLE DIAGNOSTIC METHODS FOR PRIMARY AORTO-ENTERIC FISTULA
- Resonance Properties of Surface Acoustic Wave Resonator in Supercritical CO2
- Conformal Copper Coating of True Three-Dimensional Through-Holes Using Supercritical Carbon Dioxide
- Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization
- Role of Nitrogen Precursor Supplies on InAs Quantum Dot Surfaces in Their Emission Wavelengths
- Room-Temperature Formation of a ZnO-Based Adhesion Layer for Nanoprecision Cu/Glass Metallization
- Deposition of Cu and Ru Thin Films in Deep Nanotrenches/Holes Using Supercritical Carbon Dioxide