Stress Relaxation in Low-Strain AlInN/GaN Bragg Mirrors

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概要

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• The structural behaviour of lattice mismatched AlInN/GaN-based multilayer structures grown on sapphire substrates by metal organic vapour phase epitaxy has been studied in-situ by curvature and real-surface temperature measurement, and ex-situ by atomic force microscope, field-emission secondary electron microscope, Nomarski microscope and various X-ray diffraction techniques. Samples grown with AlInN layers obtaining a slightly lower and a higher indium concentration compared to the lattice matched samples show a strong degradation of the AlInN/GaN double layers. The degradation of the multilayer structures both on a microscopic and on a macroscopic scale is investigated, revealing a much stronger roughening of the AlInN surfaces with higher indium concentration. The roughening is attributed to a Stranski--Krastanov transition from two-dimensional to three-dimensional growth mode.

• 2011-03-25

著者

• Christen Jurgen

  Institute Of Experimental Physics Otto-von-guericke University

• KROST Alois

  Institut fur Festkorperphysik, TU-Berlin

• Krost Alois

  Institut Fur Festkorperphysik Tu-berlin

• DADGAR Armin

  Institut fur Festkorperphysik, Technische Universitat Berlin

• Christen Jurgen

  Institut Fur Experimentelle Physik Otto-von-guericke Universitat

• BLASING Jurgen

  Institut fur Experimentelle Physik, Otto-von-Guericke Universitat

• Moser Pascal

  Institut für Experimentelle Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39

• Hempel Thomas

  Institut für Experimentelle Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39

• Hempel Thomas

  Institut für Experimentelle Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39106 Magdeburg, Germany

• Bläsing Jürgen

  Institut für Experimentelle Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39106 Magdeburg, Germany

• Dadgar Armin

  Institut für Experimentelle Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39106 Magdeburg, Germany

• Krost Alois

  Institut für Experimentelle Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39106 Magdeburg, Germany

• Moser Pascal

  Institut für Experimentelle Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39106 Magdeburg, Germany

• Christen Jürgen

  Institut für Experimentelle Physik, Otto-von-Guericke-Universität Magdeburg, Universitätsplatz 2, 39106 Magdeburg, Germany

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