Fabrication of Magnetic Tunnel Junctions with a Synthetic Ferrimagnetic Free Layer for Magnetic Field Sensor Applications
スポンサーリンク
概要
- 論文の詳細を見る
Magnetic tunnel junctions (MTJs) with a CoFeB/Ru/Ni80Fe20 synthetic ferrimagnetic free layer and an MgO barrier layer were fabricated. The effect of the shape and thickness of the free layer on the magnetic field sensor characteristics was systematically investigated. We achieved a high sensitivity of 4.8%/Oe in the MTJ with a 70-nm-thick Ni80Fe20 layer and an aspect ratio of 1.0. Here, sensitivity is defined as TMR/($2H_{\text{k}}$), where TMR is tunnel magnetoresistance ratio in the MTJ and $H_{\text{k}}$ is a magnetic anisotropy field of the free layer. Furthermore, we successfully increased the detection field range up to 230 Oe while keeping high sensitivity and linearity.
- 2011-01-25
著者
-
Oogane Mikihiko
Department Of Applied Physics Graduate School Of Engineering Tohoku University
-
Ando Yasuo
Department Of Applied Physics Graduate School Of Engineering Tohoku University
-
Naganuma Hiroshi
Department Of Applied Physics Faculty Of Science Tokyo University Of Science
-
Watanabe Daisuke
Wpi Advanced Institute For Materials Research Tohoku University
-
Fujiwara Kousuke
Department of Applied Physics, Graduate School of Engineering, Tohoku University, Sendai 980-8579, Japan
-
Kou Futoyoshi
Corporate Technology Development Group, RICOH Co., Ltd., Natori, Miyagi 981-1241, Japan
関連論文
- Direct Observation of Atomic Ordering and Interface Structure in Co_2MnSi/MgO/Co_2MnSi Magnetic Tunnel Junctions by High-Angle Annular Dark-Field Scanning Transmission Electron Microscopy
- Large Tunnel Magnetoresistance of 1056% at Room Temperature in MgO Based Double Barrier Magnetic Tunnel Junction
- Gilbert Damping for Various Ni_Fe_ Thin Films Investigated Using All-Optical Pump-Probe Detection and Ferromagnetic Resonance
- Tunnel Magnetoresistance Effect in Magnetic Tunnel Junctions Using a Co_2MnSi(110) Electrode
- Tunneling Spin Polarization and Magnetic Properties of Co-Fe-B Alloys and Their Dependence on Boron Content
- Anisotropic Intrinsic Damping Constant of Epitaxial Co_2MnSi Heusler Alloy Films
- Temperature Dependence of Tunnel Magnetoresistance in Co-Mn-Al/Al-Oxide/Co-Fe Junctions
- Spin-Dependent Inelastic Electron Tunneling Spectroscopy of Magnetic Tunnel Junctions
- Large Magnetoresistance in Magnetic Tunnel Junctions Using Co-Mn-Al Full Heusler Alloy
- New Magnetic Nano-Dot Memory with FePt Nano-Dots
- Fabrication and Evaluation of Magnetic Tunnel Junction with MgO Tunneling Barrier
- Unique Histopathological Features of a Familial Dilated Cardiomyopathy with Conduction Defect Caused by a Lamin A/C Gene Mutation
- Simple Process Synthesis of BaTiO_3-(Ni,Zn,Cu)Fe_2O_4 Ceramic Composite(Cross-disciplinary physics and related areas of science and technology)
- Acute Suppurative Thyroiditis Arising from a Piriform Sinus Fistula: CT Diagnosis
- Presarcral Neurilemmoma Mimicking Degenerated Subserosal Uterine Leiomyoma
- Structural characterization of epitaxial multiferroic BiFeO3 films grown on SrTiO3 (100) substrates by crystallizing amorphous Bi–Fe–Ox
- Organized Chronic Subdural Hematoma Requiring Craniotomy
- CXC Chemokine Receptor 1 (CXCR1) is Expressed Mainly by Neutrophils in Inflamed Gut and Stomach Tissues
- Papillary carcinoma of the thyroid gland forming a myofibroblastic nodular tumor : Report of two cases and review of the literature
- Optically clear nuclei in papillary carcinoma of the thyroid : Demonstration of one of the fixation artifacts and its practical usefulness
- MICROWAVE-STIMULATED FIXATION FOR HISTOCYTOCHEMISTRY: APPLICATION TO SURGICAL PATHOLOGY AND PREEMBEDDING IMMUNOELECTRON MICROSCOPY (Microwave Fixation in Histochemistry)
- Evaluation of ferroelectric hysteresis loops of leaky multiferroic BiFeO3 films using a system with a high driving frequency of 100 kHz system
- Scanning Tunneling Microscopy Observation of the Initial State of Oxidation in Ferromagnetic Tunnel Junctions : Magnetism
- The Study on Ferromagnetic Resonance Linewidth for NM/80NiFe/NM (NM = Cu, Ta, Pd and Pt) Films
- Annealing Effect on Low-Resistance Ferromagnetic Tunnel Junctions
- Magnetoresistance Effect in Tunnel Junctions with Perpendicularly Magnetized $D$022-Mn3-\deltaGa Electrode and MgO Barrier
- Fabrication of Magnetic Tunnel Junctions with a Synthetic Ferrimagnetic Free Layer for Magnetic Field Sensor Applications
- Retraction: ``Large Tunnel Magnetoresistance of 1056% at Room Temperature in MgO Based Double Barrier Magnetic Tunnel Junction''
- Structural Analysis of Polycrystalline BiFeO_3 Films by Transmission Electron Microscopy
- Evaluation of Electrical Properties of Leaky BiFeO3 Films in High Electric Field Region by High-Speed Positive-Up--Negative-Down Measurement
- Thermooptic Property of Polycrystalline BiFeO3 Film
- Estimation of Leakage Current Density and Remanent Polarization of BiFeO3 Films with Low Resistivity by Positive, Up, Negative, and Down Measurements
- Laser-Induced Fast Magnetization Precession and Gilbert Damping for CoCrPt Alloy Thin Films with Perpendicular Magnetic Anisotropy
- Malignant fibrous histiocytoma of the esophagus
- A case of angiomatous tumor arising in soft tissue of the wrist
- Influence of Pt doping on Gilbert damping in permalloy films and comparison with the perpendicularly magnetized alloy films
- Enhancement of Tunnel Magnetoresistance Effect on Junction with Co Cluster Layers in Coulomb Blockade Regime
- Significance of fat stains in serial sections from Epon-embedded tissue samples for electron microscopy in renal diseases
- Direct Observation of Magnon Excitation in a Ferromagnetic Tunnel Junction Using Inelastic-Electron-Tunneling Spectroscopy
- Determination of Penetration Depth of Transverse Spin Current in Ferromagnetic Metals by Spin Pumping
- Annealing Temperature Dependences of Ferroelectric and Magnetic Properties in Polycrystalline Co-Substituted BiFeO3 Films
- Magnetic Damping in Ferromagnetic Thin Films
- Composition dependence in BiFeO3 film capacitor with suppressed leakage current by Nd and Mn cosubstitution and their ferroelectric properties
- Structural Analyses of Co- and Mn-Substituted BiFeO Polycrystalline Films
- Local Transport Property on Ferromagnetic Tunnel Junction Measured Using Conducting Atomic Force Microscope
- Damping of Magnetization Precession in Perpendicularly Magnetized CoFeB Alloy Thin Films
- Large Magnetoresistance Effect in Epitaxial Co_2Fe_Mn_Si/Ag/Co_2Fe_Mn_Si Devices
- Optical Properties of BiFeO3-System Multiferroic Thin Films
- Dependence of Tunnel Magnetoresistance Effect on Fe Thickness of Perpendicularly Magnetized L1_0-Mn_Ga_/Fe/MgO/CoFe Junctions
- Electrooptic and Piezoelectric Properties of (Pb,La)(Zr,Ti)O3 Films with Various Zr/Ti Ratios
- Damping of Magnetization Precession in Perpendicularly Magnetized CoFeB Alloy Thin Films
- La Content Dependence of Electrooptic Properties of Polycrystalline (Pb,La)(Zr0.65,Ti0.35)O3 Thick Films
- Fabrication of Co2MnAl Heusler Alloy Epitaxial Film Using Cr Buffer Layer
- Fabrication and Evaluation of Magnetic Tunnel Junction with MgO Tunneling Barrier
- Structure and Magnetic Properties of Iron Nitride Films Prepared by Reactive dc Magnetron Sputtering
- Large Magnetoresistance in Magnetic Tunnel Junctions Using Co-Mn-Al Full Heusler Alloy
- Gilbert Damping in Ni/Co Multilayer Films Exhibiting Large Perpendicular Anisotropy
- Spin-Dependent Inelastic Electron Tunneling Spectroscopy of Magnetic Tunnel Junctions
- Structural and Magnetic Properties of Co2MnSi Heusler Alloy Thin Films on Si
- Huge Spin-Polarization of L21-Ordered Co2MnSi Epitaxial Heusler Alloy Film
- New Magnetic Nanodot Memory with FePt Nanodots
- A Simple Fabrication Process using Focused Ion Beam for Deep Submicron Magnetic Tunnel Junctions
- Boron Composition Dependence of Spin-Transfer Switching in Magnetic Tunnel Junctions with CoFeB Free Layers
- Temperature Dependences of Spin-Diffusion Lengths of Cu and Ru layers
- Crystal Structure and Electrical Properties of {100}-Oriented Epitaxial BiCoO3–BiFeO3 Films Grown by Metalorganic Chemical Vapor Deposition
- Spin Injection into Organic Light-Emitting Devices with Ferromagnetic Cathode and Effects on Their Luminescence Properties
- Crystal Structure Analysis of Epitaxial BiFeO3–BiCoO3 Solid Solution Films Grown by Metalorganic Chemical Vapor Deposition
- The Enhancement of Magnetic Damping in Fe
- Enhancement of Spin Pumping Efficiency in Fe
- Observation of Precessional Magnetization Dynamics in L1
- High-Magnetoresistance Tunnel Junctions Using Co_Fe_ Ferromagnetic Electrodes
- The Enhancement of Magnetic Damping in Fe₄N Films with Increasing Thickness (Spintronics, superconductivity, and strongly correlated materials)
- Enhancement of Spin Pumping Efficiency in Fe₄N/Pt Bilayer Films
- Observation of Precessional Magnetization Dynamics in L1₀-FePt Thin Films with Different L1₀ Order Parameter Values (Spintronics, superconductivity, and strongly correlated materials)