Structure and Magnetic Properties of Iron Nitride Films Prepared by Reactive dc Magnetron Sputtering
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概要
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We have investigated the structure and magnetic properties of iron nitride films prepared by reactive dc magnetron sputtering with an argon gas flow rate of 12 sccm and a nitrogen gas flow rate varied between 0–10 sccm. Under the above conditions, the nitrogen concentrations in the iron nitride films were changed from 0 to 33 at.%. The phase and structure of the films changed from $\alpha$-Fe, amorphous matrix with nanocrystallites of $\epsilon$-Fe3N, $\epsilon$-FexN ($2<x\leqq 3$) to $\zeta$-Fe2N phase as the nitrogen concentration of the iron nitride films increases, and these changes in the phase almost correspond to the Fe–N phase diagram. The saturation magnetization of the iron nitride films decreases as the nitrogen concentration increases up to 31 at.%, and disappears at 33 at.%. A relatively low coercivity of 9 Oe is observed at the nitrogen concentrations from 11 to 18 at.%. From the results of structural analysis and magnetic measurements, it is confirmed that the coercivity of the iron nitride films mostly correlates with the changes in grain size.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-07-15
著者
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ENDO Yasushi
Frontier Research Center, Graduate School of Engineering, Osaka University
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Nakatani Ryoichi
Frontier Research Center Graduate School Of Engineering Osaka University
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Yamamoto Masahiko
Frontier Research Center Graduate School Of Engineering Osaka University
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Kawamura Yoshio
Department Of Material Science And Engineering Osaka University
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Naganuma Hiroshi
Department Of Applied Physics Faculty Of Science Tokyo University Of Science
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Naganuma Hiroshi
Department of Materials Science and Engineering, Graduate School of Engineering, Osaka University, Yamadaoka, Suita, Osaka 565-0871, Japan
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Nakatani Ryoichi
Frontier Research Center, Graduate School of Engineering, Osaka University, Yamadaoka, Suita,Osaka 565-0871, Japan
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Kawamura Yoshio
Department of Materials Science and Engineering, Graduate School of Engineering, Osaka University, Yamadaoka, Suita, Osaka 565-0871, Japan
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Endo Yasushi
Frontier Research Center, Graduate School of Engineering, Osaka University, Yamadaoka, Suita,Osaka 565-0871, Japan
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