Improvements in Temperature Characteristics and Bandwidth for ZnO/Quartz Structure with Large Coupling Factor
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概要
- 論文の詳細を見る
Recently, several applications have required radio frequency filters with a narrow bandwidth and high attenuations. A ZnO film/quartz structure has a good potential to such a requirement. In this paper, we show the optimization of the ZnO/quartz structure to obtain a nearly zero temperature coefficient of frequency (TCF) while maximizing the electro-mechanical coupling coefficient ($k^{2}$). In the previous papers published by one of the authors about the ZnO/quartz structure, a nearly zero TCF with a small electro-mechanical coupling coefficient, or non-zero TCF with maximized $k^{2}$ was reported. However, both zero TCF and maximized $k^{2}$ have not yet been simultaneously obtained. In this study, we investigated the optimized structure by calculation and also confirmed it by measurement.
- 2010-07-25
著者
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Hashimoto Ken-ya
Graduate School Of Engineering Chiba University
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Kadota Michio
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Kadota Michio
Murata Mfg. Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Kimura Tetsuya
Murata MFG Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Murata Takaki
Murata Mfg. Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Matsuda Kenji
Murata Mfg. Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Murata Takaki
Murata Manufacturing Co., Ltd., 10-1 Higashikotari 1-chome, Nagaokakyo, Kyoto 617-8555, Japan
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Hashimoto Ken-ya
Graduate School of Engineering, Chiba University, Inage-ku, Chiba 263-8522, Japan
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Kimura Tetsuya
Murata Manufacturing, Co., Ltd., 10-1 Higashikotari 1-chome, Nagaokakyo, Kyoto 617-8555, Japan
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Matsuda Kenji
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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