Piezoelectric Characteristics of ZnO Films Deposited Using an Electron Cyclotron Resonance Sputtering System
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-09-30
著者
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KADOTA Michio
Murata Mfg. Co. , Ltd.
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KASANAMI Toru
Murata MFG. Co., Ltd.
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MINAKATA Makoto
Research Institute of Electronics, Shizuoka Universiry
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Kadota M
Murata Mfg. Co. Ltd. Kyoto Jpn
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Kasanami T
Murata Mfg. Co. Ltd. Kyoto
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Kasanami Toru
Murata Manufacturing Co. Lid.
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MINAKATA Makoto
Tohoku University
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Kadota Michio
Murata Mfg Co. Ltd. Kyoto Jpn
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Minakata M
Research Institute Of Electronics Shizuoka Universiry
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Kadota Michio
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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- S
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