SiO2/Grooved Al Electrode/LiTaO3 and Edge-Reflection Surface Acoustic Wave Structures Having Large Reflection Coefficient, Large Coupling Factor, and Excellent Temperature Characteristic Even If Al Electrodes Are Used
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概要
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A surface acoustic wave (SAW) substrate for a duplexer, such as a Personal Communication Service handy phone system in the U.S.A, is required to have a good temperature stability, an optimum electromechanical coupling factor, and a large reflection coefficient. The conventional method of depositing a SiO2 film on a thick Al electrode/LiTaO3 substrate to improve its temperature coefficient of frequency (TCF) is not effective for SAW resonator-type devices, because good frequency characteristics are not obtained due to large convex portions on the surface of SiO2 film. However, resonators having a large reflection coefficient, an excellent TCF, and good frequency characteristics were realized using the following two new structures: (I) SiO2 film/grooved Al electrode/LiTaO3 structure and (II) reflection of a shear horizontal (SH) wave at free edges on a SiO2 film/thin Al electrode/LiTaO3 structure substrate.
- 2006-05-30
著者
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Kadota Michio
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Kadota Michio
Murata MFG Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Kimura Tetsuya
Murata MFG Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Kimura Tetsuya
Murata Manufacturing, Co., Ltd., 10-1 Higashikotari 1-chome, Nagaokakyo, Kyoto 617-8555, Japan
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