High-Frequency Lamb Wave Device Composed of LiNbO3 Thin Film
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概要
- 論文の詳細を見る
It has been considered that it is difficult to realize a high-frequency device of 3 GHz or more, for instance, for a fourth generation mobile phone system in Japan, using a conventional surface acoustic wave (SAW) substrate. In this study, we attempted to fabricate a high-frequency resonator using Lamb waves, which has a high velocity and consists of a thin LiNbO3 film deposited by chemical vapor deposition (CVD). As a result, a 1-port Lamb wave resonator composed of an electrode/thin epitaxial LiNbO3 film/air-gap/base substrate was fabricated. The measured resonator has a high resonant frequency of 4.5 GHz, which corresponds to a very high velocity of 14,000 m/s, a large impedance ratio of 52 dB, and a relatively wide bandwidth of 7.2%.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-07-25
著者
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Kadota Michio
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Ogami Takashi
Murata Manufacturing, Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Yamamoto Kansho
Murata Manufacturing, Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Tochishita Hikari
Murata MFG Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Negoro Yasuhiro
Murata Manufacturing, Co., Ltd., 10-1 Higashikotari 1-chome, Nagaokakyo, Kyoto 617-8555, Japan
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Ogami Takashi
Murata Manufacturing, Co., Ltd., 10-1 Higashikotari 1-chome, Nagaokakyo, Kyoto 617-8555, Japan
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Yamamoto Kansho
Murata Manufacturing, Co., Ltd., 10-1 Higashikotari 1-chome, Nagaokakyo, Kyoto 617-8555, Japan
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Tochishita Hikari
Murata Manufacturing, Co., Ltd., 10-1 Higashikotari 1-chome, Nagaokakyo, Kyoto 617-8555, Japan
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Tochishita Hikari
Murata Manufacturing Co., Ltd., Yasu, Shiga 520-2393, Japan
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Ogami Takashi
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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