Surface Acoustic Wave Characteristics of a ZnO/Quartz Substrate Structure Having a Large Electromechanical Coupling Factor and a Small Temperature Coefficient

概要

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A substrate having a suitable electromechanical coupling factor (k_s) value and a good temperature coefficient of frequency (TCF) is required for an applications of resonator surface acoustic wave (SAW) filters and rudder-type SAW filters requiring a specific bandwidth, because their bandwidth largely depends on the coupling factor of the substrate. Although a quartz substrate for SAW devices provides a good TCF, the electromechanical coupling factor obtained is small. The author speculated that an excellent TCF and an appropriate electromechanical coupling factor could be realized by combination of a quartz substrate having a positive TCF and a ZnO film having a negative TCF. As a result of theoretical and experimental investigations performed using a 29°45' rotated Y and a 42°45' rotated Y 35°X propagating quartz substrate, an excellent TCF (≈ 0 ppm/°C) and an appropriate coupling factor (k_s = 0.1-0.11; k^2_s = 0.01-0.0121) were realized with a zero degree power flow angle on the structure of IDT/ZnO/quartz or IDT/ZnO/shorted-plane/quartz for the first time.
社団法人応用物理学会の論文
1997-05-30