High-Frequency Surface Acoustic Wave Resonator Filter Composed of ZnO/High-Density Electrode/Quartz Structure
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概要
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In this paper, we describe the development of a radio frequency (RF) narrow-band surface acoustic wave (SAW) resonator filter composed of a ZnO/high-density metal electrode/quartz structure. First, theoretical analyses were performed to obtain a sufficient reflection coefficient and an appropriate electromechanical coupling factor, where ZnO thickness, type of electrode material, electrode thickness, and metallization ratio were used as variables. Second, one-port SAW resonators were fabricated to confirm the results of the above calculation, and a good agreement between the calculation and measurement results was obtained. Next, an RF narrow-band SAW resonator filter consisting of ZnO/Au interdigital transducer (IDT)/32° YX quartz was fabricated, and a minimum insertion loss of 2.08 dB, a $-3$ dB bandwidth of 3.9 MHz (0.054%), and an excellent temperature coefficient of frequency (TCF) of 4.0 ppm/°C were simultaneously achieved.
- 2009-07-25
著者
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Kadota Michio
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Matsuda Kenji
Murata Mfg. Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Murata Takaki
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Murata Takaki
Murata Manufacturing Co., Ltd., 10-1 Higashikotari 1-chome, Nagaokakyo, Kyoto 617-8555, Japan
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Nakao Takeshi
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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Matsuda Kenji
Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto 617-8555, Japan
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- S
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