Growth of $\langle 1\bar{1}00\rangle$ Epitaxial ZnO Film on $Y$-Plane LiNbO3 Substrate

概要

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A $\langle 0001\rangle$ oriented polycrystal ZnO film is deposited on many types of substrate. However, an epitaxial ZnO film is deposited on only specific substrates, because it depends greatly on the lattice constant of the substrate. An epitaxial ZnO film with the $c$-axis oriented horizontally on some types of substrate has been reported. In this study, a $\langle 1\bar{1}00\rangle$ orientated epitaxial ZnO film has been deposited on a pre-heat-treated $Y$-plane ($01\bar{1}0$) LiNbO3 substrate for the first time. A $\langle 0001\rangle$ oriented polycrystal ZnO film has also been deposited on this substrate without pre-heat-treatment. Thus, two orientation directions can be controlled by pre-heat-treatment for the first time. Moreover, their applications to shear bulk wave transducers and surface acoustic wave devices are discussed.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2008-05-25