Surface Acoustic Wave Characteristics on ZnO/YZ・LiNbO_3 Structure and Their Application to Elastic Convolver

概要

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In an effort to improve the efficiency of an elastic convolver, we discussed ways to increase the electromechanical coupling factor of the LiNbO_3 (LN) substrate. We examined, both theoretically and experimentally, the surface acoustic wave (SAW) characteristics of ZuO films formed on the +Y・ and -Y・planes of the YZ・LN substrates. As a result, it was clear that a larger electromechanical coupling factor, k_s, can be obtained with a ZnO film on the +Y・plane than on the -Y・plane of YZ・LN substrates. The maximum value of the coupling factor obtained was 0.32, which was 2.04 times the square (k^2_s) of the value obtained without the ZnO film. By applying the LN substrate with the ZnO film on its +Y・plane to the elastic convolver, we obtained a processing time of 7.6 μs, a 3 dB bandwidth of 44 MHz and an efficiency of -58 dBm.
社団法人応用物理学会の論文
1995-05-30