The Spatial Distribution of Deposition Rates in the DC Diode Sputtering of ZnO Thin Film
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1972-12-05
著者
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MINAKATA Makoto
Research Institute of Electronics, Shizuoka Universiry
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Chubachi Noriyoshi
Research Institute Of Electrical Communication Tohoku University
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KIKUCHI Yoshimitsu
Research Institute of Electrical Communication, Tohoku University
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Kikuchi Yoshimitsu
Research Institute Of Electrical Communication Tohoku University
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Minakata Makoto
Research Institute Of Electrical Communication Tohoku University
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CHUBACHI Noriyoshi
Research Institute of Electrical Communication, Tohoku University
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