Simplified Boundary Modeling for Resonating Structures by Scattering Analysis
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概要
- 論文の詳細を見る
In this paper, we discuss a simplified boundary modeling for numerical simulation of complex real resonator devices by prior scattering analysis. Appropriate boundary conditions are a crucial factor for accurate simulation of resonator devices. We propose to analyze the scattering of propagating eigenmodes at the substrate-to-membrane anchor of the resonating structure and show that model simplification is feasible, provided that the backscattered energy at the anchor/substrate boundary is small and the contribution of energy tunneling by evanescent modes is negligible. Exemplarily, we analyze the model of a film bulk acoustic resonator (FBAR).
- 2011-02-25
著者
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Omori Tatsuya
Graduate School Of Engineering Chiba University
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Hashimoto Ken-ya
Graduate School Of Engineering Chiba University
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Hashimoto Ken-ya
Graduate School of Science and Technology, Chiba University, Chiba 263-8522, Japan
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Thalmayr Florian
Graduate School of Science and Technology, Chiba University, Chiba 263-8522, Japan
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Ueda Masanori
Taiyo Yuden Ltd., Akashi, Hyogo 674-8555, Japan
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Yamaguchi Masatsune
Graduate School of Science and Technology, Chiba University, Chiba 263-8522, Japan
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Yamaguchi Masatsune
Graduate School of Engineering, Chiba University, 1-33 Yayoi-cho, Inage-ku, Chiba 263-8522, Japan
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