Dual-Gate Single-Electron Transistor with Silicon Nano Wire Channel and Surrounding Side Gates
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概要
- 論文の詳細を見る
In this paper, we propose a novel self-aligned dual-gate single-electron transistor having nano wire channel and surrounding side gates. By restricting the control gate effect to the top surface of the channel and intensifying the depletion effect through the surrounding side gates, the parasitic metal–oxide–silicon field-effect transistor (MOSFET) current and the quantum dot size are expected to be decreased. These advantages of the proposed structure are investigated through three-dimensional (3D) device simulation. In addition, the devices are fabricated by utilizing the silicon process and their electrical characteristics are analyzed at both room temperature and low temperature. Also, diverse device parameters are extracted from the measurement results, and they are systematically compared.
- 2010-04-25
著者
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LEE Dong
Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Compu
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KANG Kwon-Chil
Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Compu
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LEE Joung-Eob
Inter-University Semiconductor Research Center (ISRC) and School of Electrical Engineering and Compu
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Byung-Gook Park
Inter-University Semiconductor Research Center (ISRC) and School of Electrical and Computer Science, Seoul National University, San 56-1, Sillim-dong, Gwanak-ku, Seoul 151-742, Republic of Korea
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Jung Han
Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Science, Seoul National University, 599 Gwanak-ro, Gwanak-gu, Seoul 151-742, Republic of Korea
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Joung-Eob Lee
Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Science, Seoul National University, 599 Gwanak-ro, Gwanak-gu, Seoul 151-742, Republic of Korea
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Hong-Seon Yang
Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Science, Seoul National University, 599 Gwanak-ro, Gwanak-gu, Seoul 151-742, Republic of Korea
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Dong Seup
Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Science, Seoul National University, 599 Gwanak-ro, Gwanak-gu, Seoul 151-742, Republic of Korea
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Kwon-Chil Kang
Inter-University Semiconductor Research Center and School of Electrical Engineering and Computer Science, Seoul National University, 599 Gwanak-ro, Gwanak-gu, Seoul 151-742, Republic of Korea
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