Electrical Properties of a Silicon Nanocrystal Embedded in a Thin Oxide Layer
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概要
- 論文の詳細を見る
Electrostatic force microscopy (EFM) and scanning capacitance microscopy (SCM) were used to probe electrically silicon nanocrystals (NCs) deposited on an insulating layer. NC samples were produced by aerosol techniques followed by a sharpening oxidation. The size of the NCs is in the range of 10–50 nm with a density of around $10^{11}$/cm2. Using a conducting tip, a charge was injected directly into the NCs, and the bias-dependent images resulting from the trapped charges in the NCs were monitored. EFM can be used to estimate the charging effects affected by the size of the NCs and the injection direction, from the tip or the substrate, by measuring the apparent height difference between NCs. Capacitance spectroscopy and related SCM images show that SCM can be an adequate tool for more detailed analysis of the charging and discharging effects of each NC.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-03-30
著者
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Kim Jung-min
Department Of Food & Nutrition In Oriental Medicine Semyung University
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Kim Yong-sang
Department Of Electrical Engineering Myongji University
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Park Ji-yong
Department Of Electrical Engineering Ucla:presently With Advanced Power Technology
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Choi Young
Department Of Biological Sciences Purdue University Calumet
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Kang Chi
Department of Physics, Myongji University, Yongin, Gyeonggi-do 449-728, Korea
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Kang Chi
Department of Nano Science and Engineering, Myongji University, Yongin, Gyeonggi 449-728, Korea
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Park Ji-Yong
Department of Physics, Ajou University, Suwon, Gyeonggi-do 443-749, Korea
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Son Jeong-Min
Department of Physics, Myongji University, Yongin, Gyeonggi-do 449-728, Korea
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Lee Euy-Kyu
Department of Physics, Myongji University, Yongin, Gyeonggi-do 449-728, Korea
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Khang Yoonho
Materials Lab, Samsung Advanced Inst. of Tech., Yongin, Gyeonggi-do 446-711, Korea
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Kim Jung-Min
Department of Electrical Engineering, Myongji University, Yongin, Gyeonggi-do 449-728, Korea
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Khang Yoonho
Material Laboratory, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
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Kim Yong-Sang
Department of Electrical Engineering, Myongji University, Yongin, Gyeonggi-do 449-728, Korea
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Kim Yong-Sang
Department of Electrical Engineering and Nano-Bio Reaserch Center, Myongji University, Gyeonggi 449-728, Korea
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Choi Young
Department of Physics, Myongji University, Yongin, Gyeonggi-do 449-728, Korea
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CHOI Young
Department of Agricultural Biotechnology, Seoul National University
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