Localized Charging Properties of Si Nanocrystals Embedded in a SiO2 Layer by Scanning Capacitance Microscopy
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概要
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In this work, we characterized charging properties of silicon nanocrystals (NCs) using scanning capacitance microscopy (SCM). The size of the NCs produced by pyrolysis method is in the range of 10–50 nm with a density of around $10^{11}$/cm2. Using a conducting tip, a charge was injected directly into the NCs, and the charging characteristics of a NC were analyzed through the $dC/dV$–$V$ curve shift and SCM images. Bias voltage stress to a NC cause the variation of capacitance due to the electron charging, which is reflected in SCM images. By measuring consecutive $dC/dV$–$V$ curve shift after NC charging, we also analyzed retention characteristics of a NC. In temperature dependence experiment, NC reveals the characteristics of good chargeability at high temperature. Capacitance spectroscopy and related SCM images show that SCM can be an adequate tool for more detailed analysis of the charging and discharging effects of each NC.
- 2008-06-25
著者
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Yang Hyun
Department Of Computer Science Kaist
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Kim Yong
Department And Research Institute Of Rehabilitation Medicine Yonsei University College Of Medicine
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Choi Young
Department Of Biological Sciences Purdue University Calumet
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Sung Seung
Department of Nano Science and Engineering, Myongji University, Yongin, Gyeonggido 449-728, Korea
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Kang Chi
Department of Nano Science and Engineering, Myongji University, Yongin, Gyeonggido 449-728, Korea
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Kang Chi
Department of Nano Science and Engineering, Myongji University, Yongin, Gyeonggi 449-728, Korea
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Kim Jaewan
Department of Physics, Myongji University, Yongin, Gyeonggi 449-728, Korea
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Kim Jaewan
Department of Physics, Myongji University, Yongin, Gyeonggido 449-728, Korea
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Yang Hyun
Department of Nano Science and Engineering, Myongji University, Yongin, Gyeonggido 449-728, Korea
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Shin Sangmo
IMSE, Gwangju Institute of Science and Technology, Gwangju 500-712, Korea
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Kim Yong
Department of Nano Science and Engineering, Myongji University, Yongin, Gyeonggido 449-728, Korea
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