Experimental Setup for in Situ Investigation of Phase Changing Behavior in Phase-Change Random-Access Memory Medium by Microfocusing Nanosecond-Time-Resolved Ellipsometry
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概要
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An ellipsometer with nanosecond time resolution has been proposed for the investigation of the phase change behavior of Ge2Sb2Te5 heated by electrical pulses of 20–100 ns in real time. This passive single-wavelength ellipsometer has a division-of-amplitude photopolarimeter (DOAP) configuration for polarization state detection to collect ellipsometric data in nanoseconds and consists of a microfocusing lens system to achieve a spot size of ${\sim}15$ μm.
- 2006-08-15
著者
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Lee Sang
Materials Lab. Samsung Advanced Institute Of Technology
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An Sung
Department Of Neurosurgery Spine And Spinal Cord Institute Yonsei University College Of Medicine
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KIM Sang
Department of Anesthesiology and Pain Medicine, Chosun University Medical School
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Kim Sang
Department of Molecular Science and Technology, Ajou University, Suwon 442-749, Korea
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Khang Yoonho
Materials Lab, Samsung Advanced Inst. of Tech., Yongin, Gyeonggi-do 446-711, Korea
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Noh Jin-Seo
Material Laboratory, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
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Kim Younhwa
Department of Molecular Science and Technology, Ajou University, Suwon 442-749, Korea
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Suh Dong-Seok
Material Laboratory, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
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Kim Kijoon
Material Laboratory, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
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Shin Woong-Chul
Material Laboratory, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
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Khang Yoonho
Material Laboratory, Samsung Advanced Institute of Technology, P.O. Box 111, Suwon 440-600, Korea
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KIM Sang
Department of Agricultural Biotechnology, Seoul National University
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