Dynamic Characteristics of the Micro-Fluidic Systems Actuated by Thermopneumatic-Method
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概要
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We investigated the dynamic characteristics of microfluidic systems under various operating conditions for micropump and microvalve. The pumping rates of the micropump are dependent on a frequency, a duty ratio of applied voltage, a poly(dimethylsiloxane) (PDMS) membrane thickness, and a channel depth. The maximum pumping rate of 64 nl/min was obtained at the applied frequency of 5 Hz and duty ratio of 4% for a PDMS membrane thickness of 450 μm and a channel depth of 100 μm. The flow rates of the microvalve with a 300 μm PDMS membrane thickness are measured as a function of an applied power. The flow rate is easily controlled by the on/off alternation with the applied power of 400 mW. The in-channel structured PDMS micropump and microvalve are fabricated with the same fabrication procedure on the same substrate.
- 2006-01-15
著者
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Kang C.
Department Of Materials Engineering Pusan National University
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Yoo Jong-Chul
Department of Electrical Engineering and Nano-Bio Reaserch Center, Myongji University, Gyeonggi 449-728, Korea
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Kim Yong-Sang
Department of Electrical Engineering and Nano-Bio Reaserch Center, Myongji University, Gyeonggi 449-728, Korea
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Jeon D.
Department of Physics Education, Seoul National University, Seoul 151-747, Korea
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Moon Min-Chul
Department of Electrical Engineering and Nano-Bio Reaserch Center, Myongji University, Gyeonggi 449-728, Korea
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