A Single Zone Azimuth Calibration for Rotating Compensator Multichannel Ellipsometry
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概要
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A rotating compensator type spectroscopic ellipsometry (RCSE) equipped with a multichannel detector was developed. For accurate data reduction, the azimuth of each optical element should be determined with respect to the plane of incidence. In this paper, we present a spectroscopic single-zone phase calibration method for RCSE utilizing multichannel measurements. With this method, the azimuth of the polarizer could be determined as accurately as in the two-zone phase method, but the time required for calibration process was reduced by half.
- 2003-05-15
著者
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Kim Ok-kyung
Department Of Physics Hanyang University
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An Ilsin
Department Of Applied Physics Hanyang University
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Lee Jaeho
Department Of Biomaterial Science College Of Natural Resources & Life Science Pusan National Uni
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Oh Hye-keun
Department Of Applied Physics Hanyang University
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Bang Kyoung-yoon
Department Of Physics Hanyang University
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An Ilsin
Department of Physics, Hanyang University, Ansan 425-791, Korea
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