Oh Hye-keun | Department Of Applied Physics Hanyang University
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概要
関連著者
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Oh Hye-keun
Department Of Applied Physics Hanyang University
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An Ilsin
Department Of Applied Physics Hanyang University
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Park Joon-Min
Department of Applied Physics, Hanyang University, Ansan 426-791, Korea
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Hong Joo-Yoo
Department of Applied Physics, Hanyang University, Ansan 426-791, Korea
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Kim Ok-kyung
Department Of Physics Hanyang University
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Lee Jaeho
Department Of Biomaterial Science College Of Natural Resources & Life Science Pusan National Uni
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Oh Hye-keun
Department Of Physics Hanyang University
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Bang Kyoung-yoon
Department Of Physics Hanyang University
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Kang Young-Min
Department of Applied Physics, Hanyang University, Ansan 426-791, Korea
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Bang Kyung-yoon
Department Of Physics Hanyang University
著作論文
- Optical Properties of the SiO-Co Composite Thin Films
- Development of Multichannel Ellipsometry with Synchronously Rotating Polarizer and Analyzer(Instrumentation, Measurement, and Fabrication Technology)
- Characterization of 193 nm Chemically Amplified Resist during Post Exposure Bake and Post Exposure Delay
- 32 nm Half Pitch Formation with High-Numerical-Aperture Single Exposure
- Patterning of 32 nm $1:1$ Line and Space by Resist Reflow Process
- A Mask Generation Approach to Double Patterning Technology with Inverse Lithography
- Optimum Biasing for 45 nm Node Chromeless and Attenuated Phase Shift Mask
- Critical Dimension Control for 32 nm Node Random Contact Hole Array Using Resist Reflow Process
- Photoresist Adhesion Effect of Resist Reflow Process
- Resist Reflow Modeling Including Surface Tension and Bulk Effect