Morphological Development and Etching of Gold Thin Film under UV-exposure in Chlorine-based Liquids
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概要
- 論文の詳細を見る
- 2004-10-05
著者
-
An Ilsin
Department Of Applied Physics Hanyang University
-
SEONG Deokkyeong
Department of Applied Physics, Hanyang University
-
Seong Deokkyeong
Department Of Applied Physics Hanyang University
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- Morphological Development and Etching of Gold Thin Film under UV-exposure in Chlorine-based Liquids
- Ellipsometry for Pellicle-Covered Surface
- Photoinduced Patterning of Gold Thin Film
- A Single Zone Azimuth Calibration for Rotating Compensator Multichannel Ellipsometry
- Optical Properties of the SiO–Co Composite Thin Films
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