共焦点式輪郭測定センサを対象とした異常値低減法の開発

概要

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This paper presents a novel technique for reducing the infl uence of such speckle phenomenon on the confocal optical system. Its measurement principle has been applied to non-contact displacement sensors. Both the height and lateral resolutions of confocal displacement sensors on the market are regarded as practically small enough. However, those sensors are inevitably infl uenced by speckles of reflected light and so they tend to detect unreasonable profile signal.This paper presents a novel technique for reducing the infl uence of such speckle noise. Its actual effect was analytically explained through the numerical simulation. Finally, the experimental results using the developed confocal profi ling sensor revealed that the outliers can be fully corrected and the confocal sensor gives the same measured profi le as that by a stylus instrument.