無電解コバルト合金2層膜の結晶配向制御

概要

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Control of the crystal orientation of electroless-deposited CoNiReP/CoP double-layered (DL) film for perpendicular magnetic recording media was attempted in order to optimize the magnetic properties. The CoP single-layered (SL) film consists of c-axis longitudinally oriented hcp structure while the CoNiReP SL one consists of c-axis perpendicularly oriented hcp structure. The CoNiReP layer deposited directly onto the CoP layer grew epitaxially, however, resulting in deteriorated properties as a perpendicular recording medium. On the other hand, when the surface of the CoP layer was treated using a SnCl2/PdCl2 catalyzing process prior to CoNiReP deposition, the epitaxial growth was disturbed and a c-axis perpendicularly oriented hcp structure was formed, resulting in properties comparable to those of the CoNiReP SL film. It is suggested that such precise controllability of the crystal orientation (i.e., the magnetic properties) of the film will be very advantageous for the fabrication of multilayered devices with higher functional properties.
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